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1

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare, Väino Sammelselg

Journal:

Journal of Crystal Growth

Year:

1995

Language:

english

File:

PDF, 582 KB

english, 1995

2

Atomic Layer Deposition of Titanium Oxide from TiI4 and H2O2

K. Kukli, M. Ritala, M. Schuisky, M. Leskelä, T. Sajavaara, J. Keinonen, T. Uustare, A. Hårsta

Journal:

Chemical Vapor Deposition

Year:

2000

Language:

english

File:

PDF, 534 KB

english, 2000

3

Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process

Jaan Aarik, Aleks Aidla, Teet Uustare, Mikko Ritala, Markku Leskelä

Journal:

Applied Surface Science

Year:

2000

Language:

english

File:

PDF, 208 KB

english, 2000

4

Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism

J. Aarik, A. Aidla, H. Mändar, T. Uustare

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 238 KB

english, 2001

5

Properties of tantalum oxide thin films grown by atomic layer deposition

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Oksana Kohan, Teet Uustare, Väino Sammelselg

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 963 KB

english, 1995

6

Epitaxial Single and Double Nanolayers of ${\rm SnO}_{2}$ and ${\rm TiO}_{2}$ for Resistive Gas Sensors

Rosental, Arnold, Tarre, Aivar, Gerst, Alar, Kasikov, Aarne, Lu, Jun, Ottosson, Mikael, Uustare, Teet

Journal:

IEEE Sensors Journal

Year:

2013

Language:

english

File:

PDF, 2.54 MB

english, 2013

7

ChemInform Abstract: Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor.

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Katarina Forsgren, Jonas Sundqvist, Anders Haarsta, Teet Uustare, Hugo Maendar, Alma-Asta Kiisler

Journal:

Year:

2001

File:

PDF, 31 KB

2001

8

Deposition and etching of tantalum oxide films in atomic layer epitaxy process

Jaan Aarik, Aleks Aidla, Kaupo Kukli, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

1994

Language:

english

File:

PDF, 240 KB

english, 1994

9

Desorption energies averaged over the desorption process by model calculations

H. Siimon, T. Uustare

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 250 KB

english, 1994

10

Effect of phase composition on X-ray absorption spectra of ZrO2 thin films

A. Kikas, J. Aarik, V. Kisand, K. Kooser, T. Käämbre, H. Mändar, T. Uustare, R. Rammula, V. Sammelselg, I. Martinson

Journal:

Journal of Electron Spectroscopy and Related Phenomena

Year:

2007

Language:

english

File:

PDF, 382 KB

english, 2007

11

Effects of precursors on nucleation in atomic layer deposition of HfO2

Jaan Aarik, Aleks Aidla, Arvo Kikas, Tanel Käämbre, Raul Rammula, Peeter Ritslaid, Teet Uustare, Väino Sammelselg

Journal:

Applied Surface Science

Year:

2004

Language:

english

File:

PDF, 239 KB

english, 2004

12

Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties

Aivar Tarre, Jaan Aarik, Hugo Mändar, Ahti Niilisk, Rainer Pärna, Raul Rammula, Teet Uustare, Arnold Rosental, Väino Sammelselg

Journal:

Applied Surface Science

Year:

2008

Language:

english

File:

PDF, 616 KB

english, 2008

13

Synthesis and neuropharmacological characterization of 2-O-substituted apomorphines

Attila Sipos, Csaba Csutorás, Sándor Berényi, Ain Uustare, Ago Rinken

Journal:

Bioorganic & Medicinal Chemistry

Year:

2008

Language:

english

File:

PDF, 158 KB

english, 2008

14

Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1’-methyl-ruthenocene

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Teet Uustare, Indrek Jõgi, Jun Lu, Massimo Tallarida, Marianna Kemell, Alma-Asta Kiisler, Mikko Ritala, Markku Leskelä

Journal:

Journal of Crystal Growth

Year:

2010

Language:

english

File:

PDF, 1.16 MB

english, 2010

15

Nanocrystalline Cr2O3–TiO2 thin films by pulsed laser deposition

T. Jantson, T. Avarmaa, H. Mändar, T. Uustare, R. Jaaniso

Journal:

Sensors and Actuators B: Chemical

Year:

2005

Language:

english

File:

PDF, 304 KB

english, 2005

16

Structural characterization of TiO2–Cr2O3 nanolaminates grown by atomic layer deposition

V. Sammelselg, A. Tarre, J. Lu, J. Aarik, A. Niilisk, T. Uustare, I. Netšipailo, R. Rammula, R. Pärna, A. Rosental

Journal:

Surface and Coatings Technology

Year:

2010

Language:

english

File:

PDF, 1.01 MB

english, 2010

17

Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature

Kaupo Kukli, Jaan Aarik, Teet Uustare, Jun Lu, Mikko Ritala, Aleks Aidla, Lembit Pung, Anders Hårsta, Markku Leskelä, Arvo Kikas, Väino Sammelselg

Journal:

Thin Solid Films

Year:

2005

Language:

english

File:

PDF, 604 KB

english, 2005

18

Effect of preparation conditions on properties of atomic layer deposited TiO2 films in Mo–TiO2–Al stacks

Indrek Jõgi, Jaan Aarik, Matti Laan, Jun Lu, Kaupo Kukli, Henn Käämbre, Timo Sajavaara, Teet Uustare

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 493 KB

english, 2006

19

Characterization of asymmetric rhombohedral twin in epitaxial α-Cr2O3 thin films by X-ray and electron diffraction

Hugo Mändar, Teet Uustare, Jaan Aarik, Aivar Tarre, Arnold Rosental

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 975 KB

english, 2007

20

Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Hugo Mändar, Väino Sammelselg, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

2000

Language:

english

File:

PDF, 302 KB

english, 2000

21

Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide

Kaupo Kukli, Katarina Forsgren, Jaan Aarik, Teet Uustare, Aleks Aidla, Antti Niskanen, Mikko Ritala, Markku Leskelä, Anders Hårsta

Journal:

Journal of Crystal Growth

Year:

2001

Language:

english

File:

PDF, 245 KB

english, 2001

22

Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on α-Al2O3 substrates

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Mikael Schuisky, Anders Hårsta

Journal:

Journal of Crystal Growth

Year:

2002

Language:

english

File:

PDF, 255 KB

english, 2002

23

Control of thin film structure by reactant pressure in atomic layer deposition of TiO2

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Hele Siimon, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

1996

Language:

english

File:

PDF, 640 KB

english, 1996

24

Ti 2p and O 1s X-ray absorption of TiO2 polymorphs

R. Ruus, A. Kikas, A. Saar, A. Ausmees, E. Nõmmiste, J. Aarik, A. Aidla, T. Uustare, I. Martinson

Journal:

Solid State Communications

Year:

1997

Language:

english

File:

PDF, 585 KB

english, 1997

25

Nanoepitaxy of SnO2 on α-Al2O3(0 1 2)

A. Tarre, A. Rosental, J. Sundqvist, A. Hårsta, T. Uustare, V. Sammelselg

Journal:

Surface Science

Year:

2003

Language:

english

File:

PDF, 324 KB

english, 2003

26

Characterization of titanium dioxide atomic layer growth from titanium ethoxide and water

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Teet Uustare, Mikko Ritala, Markku Leskelä

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 397 KB

english, 2000

27

Growth kinetics and structure formation of ZrO2 thin films in chloride-based atomic layer deposition process

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Väino Sammelselg

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 381 KB

english, 2002

28

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Alma-Asta Kiisler, Teet Uustare, Väino Sammelselg

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 375 KB

english, 1997

29

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

J Aarik, A Aidla, A.-A Kiisler, T Uustare, V Sammelselg

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 452 KB

english, 1999

30

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Kaupo Kukli, Mikael Schuisky

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 180 KB

english, 2001

31

Comparative study of low-temperature chloride atomic-layer chemical vapor deposition of TiO2 and SnO2

A Tarre, A Rosental, V Sammelselg, T Uustare

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 305 KB

english, 2001

32

Influence of structure development on atomic layer deposition of TiO2 thin films

J. Aarik, J. Karlis, H. Mändar, T. Uustare, V. Sammelselg

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 340 KB

english, 2001

33

Atomic layer deposition of TiO2 thin films from TiI4 and H2O

Jaan Aarik, Aleks Aidla, Teet Uustare, Kaupo Kukli, Väino Sammelselg, Mikko Ritala, Markku Leskelä

Journal:

Applied Surface Science

Year:

2002

Language:

english

File:

PDF, 281 KB

english, 2002

34

TiO2 thin films by atomic layer deposition: a case of uneven growth at low temperature

V Sammelselg, A Rosental, A Tarre, L Niinistö, K Heiskanen, K Ilmonen, L.-S Johansson, T Uustare

Journal:

Applied Surface Science

Year:

1998

Language:

english

File:

PDF, 2.74 MB

english, 1998

35

Resonant auger spectra of TiO2 at Ti 2p and O 1s absorption edges

R Ruus, A Saar, J Aark, A Aidla, T Uustare, A Kikas

Journal:

Journal of Electron Spectroscopy and Related Phenomena

Year:

1998

File:

PDF, 502 KB

1998

36

Atomic-layer chemical vapor deposition of SnO2 for gas-sensing applications

A Rosental, A Tarre, A Gerst, T Uustare, V Sammelselg

Journal:

Sensors and Actuators B: Chemical

Year:

2001

Language:

english

File:

PDF, 151 KB

english, 2001

37

Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition

A. Rosental, A. Tarre, A. Gerst, J. Sundqvist, A. Hårsta, A. Aidla, J. Aarik, V. Sammelselg, T. Uustare

Journal:

Sensors and Actuators B: Chemical

Year:

2003

Language:

english

File:

PDF, 165 KB

english, 2003

38

Description of the Atomic Layer Epitaxial Growth Based on Kinetic Equation Techniques

H. Siimon, T. Uustare, J. Lembra

Journal:

physica status solidi (a)

Year:

1992

Language:

english

File:

PDF, 366 KB

english, 1992

39

Effect of growth conditions on formation of TiO2-II thin films in atomic layer deposition process

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

1997

Language:

english

File:

PDF, 403 KB

english, 1997

40

Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon

Kaupo Kukli, Mikko Ritala, Teet Uustare, Jaan Aarik, Katarina Forsgren, Timo Sajavaara, Markku Leskelä, Anders Hårsta

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 134 KB

english, 2002

41

Regulation of extracellular serotonin levels and brain-derived neurotrophic factor in rats with high and low exploratory activity

Tanel Mällo, Kadri Kõiv, Indrek Koppel, Karita Raudkivi, Ain Uustare, Ago Rinken, Tõnis Timmusk, Jaanus Harro

Journal:

Year:

2008

Language:

english

File:

PDF, 414 KB

english, 2008

42

Kinetic and functional properties of [3H]ZM241385, a high affinity antagonist for adenosine A2A receptors

Ain Uustare, Argo Vonk, Anton Terasmaa, Kjell Fuxe, Ago Rinken

Journal:

Year:

2005

Language:

english

File:

PDF, 270 KB

english, 2005

43

Erratum to “Kinetic and functional properties of [3H]ZM241385, a high affinity antagonist for adenosine A2A receptors”: [Life Sciences 76 (2005) 1513–1526]

Ain Uustare, Argo Vonk, Anton Terasmaa, Kjell Fuxe, Ago Rinken

Journal:

Year:

2005

File:

PDF, 45 KB

2005

44

Modulation of dopamine D1 receptor signaling by adenosine A1 receptors in Sf9 cells requires expression of Gi proteins

Ain Uustare, Reet Reinart, Ago Rinken

Journal:

Neuroscience Letters

Year:

2006

Language:

english

File:

PDF, 153 KB

english, 2006

45

Effects of low dose N-(2-chloroethyl)-N-ethyl-2-bromobenzylamine administration on exploratory and amphetamine-induced behavior and dopamine D2 receptor function in rats with high or low exploratory activity

A. Alttoa, K. Kõiv, M. Eller, A. Uustare, A. Rinken, J. Harro

Journal:

Year:

2005

Language:

english

File:

PDF, 199 KB

english, 2005

46

Characterization of M2 muscarinic receptor activation of different G protein subtypes

Ain Uustare, Johnny Näsman, Karl E.O. Åkerman, Ago Rinken

Journal:

Neurochemistry International

Year:

2004

Language:

english

File:

PDF, 110 KB

english, 2004

47

P.2.b.014 Extracellular serotonin levels and expression of neurotrophic factors in rats with high or low novelty-related activity

J. Harro, T. Mällo, K. Koĩv, I. Koppel, K. Raudkivi, A. Uustare, A. Rinken, T. Timmusk

Journal:

European Neuropsychopharmacology

Year:

2007

Language:

english

File:

PDF, 59 KB

english, 2007

48

Global dimming and brightening versus atmospheric column transparency, Europe, 1906–2007

Ohvril, Hanno, Teral, Hilda, Neiman, Lennart, Kannel, Martin, Uustare, Marika, Tee, Mati, Russak, Viivi, Okulov, Oleg, Jõeveer, Anne, Kallis, Ain, Ohvril, Tiiu, Terez, Edward I., Terez, Galina A., Gus

Journal:

Journal of Geophysical Research

Year:

2009

Language:

english

File:

PDF, 623 KB

english, 2009

49

Refractive index gradients in TiO 2 thin films grown by atomic layer deposition

Kasikov, A, Aarik, J, Mändar, H, Moppel, M, Pärs, M, Uustare, T

Journal:

Journal of Physics D Applied Physics

Year:

2006

Language:

english

File:

PDF, 324 KB

english, 2006

50

Influence of single and double deposition temperatures on the interface quality of atomic layer deposited Al[sub 2]O[sub 3] dielectric thin films on silicon

DuenÌas, S., CastaÌn, H., GarciÌa, H., de Castro, A., BailoÌn, L., Kukli, K., Aidla, A., Aarik, J., MaÌndar, H., Uustare, T., Lu, J., HaÌrsta, A.

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 1015 KB

english, 2006